PR Series
Plasma Reactor (Barrel Chamber) (PR200)
Plasma Reactor (Barrel Chamber) (PR200)

 

Plasma Reactor (Barrel Chamber) (PR200)

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详情

Compact, Barrel Type, Low Temperature Ashing Device
 
Features of Plasma Reactor (Barrel Chamber) (PR200)
Specifications
Item Code 215016
Model PR200
System DP mode, Barrel type
High Frequency Output Max. 200W
Oscillation Frequency 13.56MHz
Tuning Method Automatic
Reaction Chamber Pyrex Glass φ100× L160mm
Reaction Gas System 1 system (oxygen), flow meter
Control System Manual leakage bulb
Piping Material SUS、Teflon
External Dimensions W350 × D400× H500mm (without projection）
Accessory Sample shelf
Internal dimensions（φ×D mm） φ100×160mm
External dimensions（W×D×H mm） 350×400×500mm
Remarks(dimensions) 00
Power Source AC115VV
/AC220V
Weight 25kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

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