详情
Compact, Barrel Type, Low Temperature Ashing Device
Features of Plasma Reactor (Barrel Chamber) (PR510)
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Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes
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RF Power: Max. 500W
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Space-saving design with oscillation section integrated with a portion of the chamber
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Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples
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Outstanding operability and safety by the automatic tuning system equipped as a standard function
Specifications
|
Item Code |
215012 |
|
Model |
PR510 |
|
System |
DP mode, Barrel type |
|
High Frequency Output |
Max. 500W |
|
Oscillation Frequency |
13.56MHz |
|
Tuning Method |
Automatic tuning |
|
Reaction Chamber |
Quartz φ215 × L305 mm x 1 chamber |
|
Reaction Gas System |
Dual system (oxygen/CF4) |
|
Control System |
Automatic touch panel |
|
Piping Material |
SUS, Teflon |
|
External Dimensions |
W520 × D630 × H760mm |
|
Accessories |
Connection cable: 1 set, Vacuum grease: 1 pc., O-ring for reaction chamber: 1 pc. |
|
Internal dimensions（φ×D mm） |
φ215×305mm |
|
External dimensions（W×D×H mm） |
520×630×760mm |
|
Remarks(dimensions) |
215φ x 305Dmm x 1 chamber |
|
Power Source |
AC200VV 8 (15A)A
Three phase |
|
Weight |
60kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
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