Plasma Cleaner (Parallel Electrode) (V1000): 马来西亚的首选 Renetech Sdn Bhd

详情

Suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.

Features of Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Surface Cleaning Device
The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
High-precision matching unit and highly reliable RF generator

Specifications

Item Code	328212
Model	V1000
Plasma Mode	DP/RIE
Oscillation Frequency	13.56MHz
RF Power	1,000W
Stage Dimensions	280W × 280D mm　Parallel flat stage
Reaction Gas	Mass flow control, 2 system + 1 for purge gas
Vacuum Pump	Included, Approx. 1,000L/min exhaust volume
Safety Device	Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions（W×D×H mm）	400×400×380mm
External dimensions（W×D×H mm）	700×800×1600mm
Remarks(dimensions)	Stage dimensions: 280W x 280D mm
Power Source	3P 200V to 415V A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200)
Weight	1000kg

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)

External dimensions do not include protrusions.