| Item Code | 328214 |
|---|---|
| Model | V1000XS |
| Plasma Mode | DP/RIE |
| Oscillation Frequency | 13.56MHz |
| RF Power | 1,000 & 1,500W |
| Stage Dimensions | 400W × 375D mm, Parallel flat double stage |
| Reaction Gas | Mass flow control, 2 system + 1 for purge gas |
| Vacuum Pump | Included, Approx. 1,000L/min exhaust volume |
| Safety Device | Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device |
| Internal dimensions（W×D×H mm） | 600×554×440mm |
| External dimensions（W×D×H mm） | 900×1000×2040mm |
| Remarks(dimensions) | Stage dimensions: 400W x 375D mm |
| Power Source |
3P 200V to 415V A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200) |
| Weight | 00kg |
Malaysia
