| Item Code | 328212 |
|---|---|
| Model | PDC510 |
| Plasma Mode | RIE and DP mode changeable |
| Electrode Structure | Parallel flat stage |
| RF Power | MAX. 500W |
| Oscillation Frequency | 13.56MHz Quartz Oscillator |
| Display | LED touch panel |
| Chamber Dimensions | W500 × D300 × H200mm |
| Stage Size | W410 × D210mm |
| Chamber Material | Aluminium |
| Reaction Gas | 2 systems（Ar, O2） |
| Purge Gas | N2 or Dry air |
| Reaction Gas Flow Control | Mass flow controller |
| Vacuum Pump | Not included |
| Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
| External Dimensions / Weight | W700 × D700 × H700mm / Approx. 180kg |
| Internal dimensions（W×D×H mm） | 500×300×200mm |
| External dimensions（W×D×H mm） | 700×700×700mm |
| Remarks(dimensions) | 00 |
| Power Source |
AC200~415V Three phase with step-down transformer |
| Weight | 180kg |
Malaysia
