| Measuring Range | (H) 20 – 115 µm | 0.8 – 4.5 mils |
| Measuring Range (Rt) | 10 – 115 µm | 0.4 – 4.5 mils |
| Minimum Roughness (Ra) 2 µm | 0.08 mils/80 µin | |
| Accuracy (H) | ± 5 µm ± | 0.2 mils |
| Accuracy (Rt)* | ± (5 µm + 5%) | ± (0.2 mils+ 5%) |
| Accuracy (Ra)* | ± (0.25 µm + 5%) | ± (0.01 mils + 5%) |
| Anvil Pressure | 1.1 Newtons | 110 grams-force |
| Anvil Size | Ø 6.35 mm | Ø 0.25 inches |
| Field of View | 3.8 x 3.8 mm | 0.149 x 0.149 inches |
| Lateral Sampling | 3.7 µm | 0.145 mils |
| Vertical Resolution | 100 nm - 2D/3D 10 nm - SDF | 3.93 µin - 2D/3D 0.393 µin - SDF |
| Resolution | 0.1 µm | 0.01 mils |
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