108 Auto Sputter Coater

Description:

The 108 Auto Sputter Coater is ideally suited for high quality coating of non-conducting samples for standard SEM imaging. The added functionality of the automatic features enable fine grain coating on a range of samples with a choice of target materials. The automatic purge and leak functions together with the optional MTM-20 High Resolution Thickness Controller offer consistent thickness for optimized conductive coating results. Cool, fine-grain sputtering is achieved with a very efficient low voltage DC magnetron head. The quick change target method allows a range of metals to be used.


Feature:

• The 108 Auto Sputter Coater offers the choice of fully automated or manual operation. The specifications also include automatic vent (with a choice of vent gas) and argon purge control.

• In automatic mode, the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the MTM-20 High Resolution Thickness Controller (optional) can be used to terminate the sputtering process at the desired thickness. Alternatively, the MTM-10 High Resolution Thickness Monitor (optional) may also be used for manual termination.

• The digital sputter current control is fully independent of the argon gas pressure in the sputtering chamber to achieve consistent sputtering rates and optimum specimen coverage.

• The efficient DC magnetron operates on a low voltage for ''ultra-cool'' sputtering to avoid effects on sample surface.

• Separate electronic valves for leak, purge and vent, coupled with a precise needle valve, ensures quick and easy operation.

• Quick target change allows for a range of materials used: Au, Au/Pd, Pt, Pt/Pd (Au fitted as standard).

• The 108 Auto Sputter Coater can be factory fitted or retrofitted at any time with our Prod. No. 93007, MTM-20 High Resolution Thickness Controller (optional).

Footprint
 (Height: 280mm)

1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Rotary pump
5. Anti-vibration base