HOT IONIZATION GAUGES
Trigon™ BAG552
Medium to Ultra High Vacuum Single Gauge
For applications that require stand-alone hot ion gauge technology, the Trigon™ family includes the single technology Bayard-Alpert Hot Ion Gauge BAG552.
The BAG552 is designed for vacuum measurement of gases in the pressure range 5 × 10-10 ... 2 x 10-2 mbar. The supported dual filament offers superior accuracy, repeatability and longevity. The BAG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC 501, VGC 502, VGC 503.
Advantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
Specifications
Measurement range (air, O2, CO, N2): 5 × 10-10 … 2 × 10-2 mbar
Accuracy
1 × 10-8 … 2 × 10-2 mbar ±15 of reading
Repeatability: 5% of reading, 10-8 … 2 × 10-2 mbar (after 10 min. stabilization)
Materials exposed to vacuum: stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten
Part Number
Spare Parts
Part Number/Description
352-420: BAG552 Spare sensor head, 25KF
352-421: BAG552 Spare sensor head, 40CF
Malaysia
