MPG40X Cold Cathode Gauge: 马来西亚的首选 SOVAQ TECHNOLOGY SDN BHD

详情

The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10^-9 mbar to atmosphere (3.8 x 10^-9 Torr to atmosphere).

Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

Advantages

Combination gauge – Inverted Magnetron & Pirani
Wide measurement range from 5 x 10^-9 mbar to atmosphere
No filament to burn out
Excellent ignition properties
Easy to clean
FPM or metal-sealed feedthrough
LED indicator for high voltage on
Logarithmic analog output signal

Typical applications

High vacuum pressure monitoring
Base pressure for evaporation and sputtering systems
General vacuum measurement and control in the medium and high vacuum range

Specifications

Measurement range (air, N₂)	mbar Torr	5 x 10^-9 … 1000 3.8 x 10^-9 … 760

Accuracy
1 x 10^-8 … 100 mbar	% of reading	≈±30%

Repeatability
1 x 10^-8 … 100 mbar	% of reading	≈±5%

Temperature
Operation (ambient)	°C	+5 … +55
Storage	°C	–40 … +65
Bake-out (1)	°C	150

Supply voltage
At gauge	V (dc)	+15 … +30
At supply unit with max. cable length (2)	V (dc)	+16 … +30
Ripple	V (p-p)	≤1

Power consumption	W	≤2

Materials exposed to vacuum		stainless steel, Al₂O₃, FPM75, Mo, Ni, Au, W

(1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.

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