Model FDS: 马来西亚的首选 EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

详情

Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing

Dry exhaust abatement system
Low power consumption
Highly efficient abatement of PFC gases
Solidification of fluorine series gases
No water scrubbing required
No fuel required

Features and Benefits

Model FDS is a dry exhaust abatement system that enables highly efficient and safe treatment of PFC gases with no need for water scrubbing. Capable of highly efficient treatment of at least 99.9% of PFC gases, and with the dry solidification of fluorine series gases after decomposition, no wastewater is generated and there is no need for treatment of toxic wastewater. Dual-cylinder types offer PFC removal efficiency of 99% or more at a maximum gas inflow rate of 250 L/min (in case of 250-L/min dual-cylinder type) and major improvements in system up time due to reactor vessel serial flow design, while a single-cylinder type enables easy replacement of existing dry exhaust abatement systems. Ideal for research laboratories that do not have wastewater treatment equipment or fuel lines.

Specifications

Model	Unit	FDS100S	FDS250
Abatement method		Dry	Dry
Reactors		1	2
Reactor life detector		Standard: Load cell Option: PFC detector	Standard: PFC detector
Max. inflow gas volume	L/min	100L/min	250L/min
Dimensions	W x D x H mm	600×600×2,000mm	1,605×1,000×2,507
Agent life	L/本	CF4: 3,000	CF4: 10,000
Gases		CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc.	CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc.