Model GCR: 马来西亚的首选 EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

Model GCR

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详情

Highly efficient, energy-saving catalysis-type exhaust abatement system

Catalysis-type exhaust abatement system
Low power consumption
Highly efficient abatement of PFC gases
No fuel required
Low maintenance costs

Features and Benefits

Model GCR is a catalysis-type exhaust abatement system that efficiently decomposes and removes gases, including PFC gases such as CF4 used for etching oxide semiconductor films, at low running costs.

Specifications

Model	Unit	GCR120*	GCR250
Abatement method		catalytic + wet	catalytic + wet
Max. inflow gas volume	L/min	120	250
Reactor life detector		PFC detector	PFC detector
Dimensions	W x D x H mm	1,200×600×1,800mm	1,400×700×1,850mm
Gases		CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc.	CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc.
*Discontinued products