Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.
Model | Unit | TND-Single A1-A4/ TND-Single P1~P4 | TND-Single Plus-A1~A4/P1~P4 |
Abatement method | burn+ wet | wet + burn + wet | |
Max. inflow gas volume | L/min | 200(per port) | 200(per port) |
400(per burner) | 400(per burner) | ||
Fuel | City gas or propane gas | City gas or propane gas | |
Dimensions | W x D x H mm | 1,200 x 650 x 1,980 | 1,200 x 650 x 1,980 |
Gases (e.g.) | Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
Process (depo) gases WF6, TiCl4, SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc. |
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Standard equipment | Washing mechanism for powder removal | Powder filtering mechanism | |
Burner scraper for powder removal | Burner scraper for powder removal | ||
Options | City water/drainage consumption reduction unit | City water/drainage consumption reduction unit | |
Fan scrubber for reduction of powder emissions | Fan scrubber for reduction of powder emissions |