Model G-WS: 马来西亚的首选 EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

详情

Optimal for low-cost treatment of water-soluble gas, space-saving, wet-type exhaust abatement system

Wet-type exhaust abatement system
Multiple gas batch processing
Countermeasures against by-products
Long-term maintenance interval
Low running costs
Low initial costs
Possible to deal with CE marking/SEMI-S2/NRTL

Features and Benefits

Is a wet-type exhaust abatement system that can be installed and operated with a low cost. It requires no fuel and a long-term maintenance cycle is realized based on Ebara's unique countermeasures against by-products that have been cultivated in combustion-type exhaust abatement systems for more than ten years. High uptime contributes to stable operation and reduction of maintenance costs and labor.
In addition, the maintenance space is in the front of the device only. A flexible layout is possible even for limited sub-fab space.
Gas to be treated: Water-soluble gas, such as NH3, DCS, TiCl4, WF6, HF, and HCl, which can be treated at room temperature

Specifications

Model		Units	G-WS1000
Maximum treated air volume		L/min	1,000
Number of connected inflow entrances			4
External dimensions		mm	W 914 x D 736 x H 1,727
External dimensions
Power use	Water quantity	L/min	1 - 10
	Displacement	L/min	1 - 10
	Nitrogen	L/min	15-50
	Power supply		1.8-3.5 kW, three-phase AC 200 V (50/60 Hz)
	Exhaust duct (treated gas)	m3/min	1.5
	Exhaust duct (housing exhaust)	m3/min	1.3
Main processable gases	Epi		HCl, DCS
	CVD		WF6, NH3, TiCl4, BCl3, ClF3, SiF4, Cl2, F2
	Etching		BCl3, HCl, HF, HBr, SiF4, Br2, Cl2, F2*
	Asher		NH3
Gases that cannot be treated by wet-type			H2, SiH4, PH3, GeH4, CH4, PFCs (CF4, SF6, NF3) etc.
* Please contact Ebara when treating