Model ESA: 马来西亚的首选 EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

详情

Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.

For fast pumping in large-volume vacuum chambers
Optional exhaust configurations for organic solvent applications
Hydrogen and other light gas pumping
Corrosion resistant material options
Oil-free
CE marking/SEMI-S2/NRTL available
Catalog

Features and Benefits

The Model ESA product lineup includes models with pumping speeds ranging from 1,400 to 10,000 L/min, suited for pumping light gases such as hydrogen, and models with exhaust speeds from 20,000 to 80,000 L/min, for fast pumping in large volume chambers. The light-gas application models with pumping speeds of 10,000 L/min and below offer a small footprint and enhanced corrosion resistance options, which are ideal for large-volume light-gas pumping applications such as MO-CVD. The larger models achieve quiet, low-vibration operation, with optional exhaust configurations for organic solvent applications. They are ideal for LCD spatter devices, vacuum drying processes, and large load-lock applications.

Specifications

Model

Unit

ESA15-D

ESA25-D

ESA25XW

ESA70W(-D)

ESA70WN(-D)

ESA80W-HDF

ESA80WN-HDF

ESA100W

ESA100WN

ESA200W

ESA300W

ESA500W

ESA700W

Pumping Speed

L/min

1,400 (50Hz)

2,500 (50Hz)

5,000 (50Hz)

7,000 (50Hz)

8,400 (50Hz/60Hz)

10,000 (50Hz/60Hz)

20,000 (50Hz/60Hz)

28,000 (50Hz)

47,000 (50Hz)

80,000 (50Hz/60Hz)

1,700 (60Hz)

3,000 (60Hz)

6,000 (60Hz)

8,400 (60Hz)

30,000 (60Hz)

50,000 (60Hz)

Ultimate Pressure

400 (50Hz)

5.3 (50Hz)

0.27 (50Hz)

0.4 (50Hz)

0.13

0.27

0.13

0.27

0.53

0.5

270 (60Hz)

4.0 (60Hz)

0.13 (60Hz)

0.27 (60Hz)

Connection

Inlet

NW40

NW50

ISO80

NW50

NW80

ISO100

ISO160

Outlet

NW40

NW50

Approx. Power at Ultimate Pressure

2.9 (50Hz)

2.6 (50Hz)

5.2 (50Hz)

3.6 (50Hz)

4.2

4.9

3.2 (50Hz)

6.6 (50Hz)

5.1 (50Hz)

7.4

3.2 (60Hz)

2.9 (60Hz)

5.8 (60Hz)

4.0 (60Hz)

3.4 (60Hz)

7.3 (60Hz)

6.7 (60Hz)

Cooling water

Flow rate

L/min

3.5~8

7~16

3.5~8

6~9

Temperature

℃

Max. 30

Flow rate

Pa•m3/s

14~17 (4.6)

17~20 (3.8)

34~40

24~27 (4.7)

54~57

54~45

17~20 (3.8)

7.5~10.5

8.5~11

Power Supply
Phase/Volt/Freq.

200V Models

3-phase/200V/50Hz
3-phase/200-220V/60Hz

400V Models

3-phase/380-400V/50Hz
3-phase/380-440V/60Hz

460V Models

3-phase/440V/50Hz
3-phase/440-480V/60Hz

Power capacity

kVA

6.4

12.8

10.3

12.6

12.0

23.7

41.3

46.5

Weight

240

480

380

400

410

700

750

1200