Model EST: 马来西亚的首选 EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

详情

Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers

High-temperature operation control
High exhaust speeds
Large pumping volumes
Corrosion resistant materials employed as standard
Enhanced corrosion resistant options
High-load applications
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available

Features and Benefits

The Model EST range uses a screw-type rotor and is equipped with a high-temperature operation function to maintain gas in the pump at high temperatures. Best suited for applications where reaction byproducts are generated, such as CVD. With corrosion resistant materials employed as standard, this model achieves high exhaust speeds and large pumping volumes and contributes to process efficiency by curbing downtime.

Specifications

Model		Unit	EST10N	EST25N	EST100WN	EST200WN	EST300WN	EST500WN	EST800WN
Pumping Speed		L/min	1,000	2,500	10,000	20,000	30,000	50,000	80,000
Ultimate Pressure		Pa	2.7	0.4	0.4	0.4	0.4	0.4	0.5
Connection	Inlet		NW40	NW40	NW50	NW100	NW100	ISO160	ISO200
Connection	Outlet		NW40	NW40	NW40	NW40	NW40	NW40	NW40
Approx. Power at Ultimate Pressure		kW	2.3	3	3.2	3.2	4.5	4.6	4.6
Cooling water	Flow rate	L/min	5~8	5~8	5~8	5~8	5~8	5~8	5~8
Cooling water	Temperature	℃	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30
N2	Flow rate	Pa•m3/s	13~18	13~18	24~29	24~29	28~31	28~31	28~31
Power Supply Phase/Volt/Freq.	200V Models		3-phase/200-220V,50/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz
Power Supply Phase/Volt/Freq.	400V Models		3-phase/380-440V,50/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	-
Power capacity		kVA	4.6	7.3	8.2	8.5	12.7	15.1	16.0
Weight		kg	260	300	380	430	500	550	840