Dry Vacuum Pumps
Model EV-S
Model EV-S

 

Model EV-S

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分类: Dry Vacuum Pumps 当前有货
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Dry vacuum pump with low power consumption and small footprint


Features and Benefits

With EBARA’s unique rotor design and idling function, the Model EV-S range achieves world-class energy efficiency and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.

Specifications
 
Model Unit EV-S20 EV-S20P/N EV-S30 EV-S30P EV-S50 EV-S50P/N EV-S100 EV-S100P/N EV-S200 EV-S200P/N
Pumping Speed L/min 1,670 1,670 3,300 3,300 5,000 5,000 10,000 10,000 20,000 20,000
Ultimate Pressure Pa 3 5 0.5 1.0 0.5 0.5 0.5 0.5 0.5 0.5
Connection Inlet   NW50 NW50 NW50 NW50 NW50 NW50 NW80 NW80 NW100 NW100
Outlet   NW25 NW25 NW25 NW25 NW25 NW25 NW25 NW25 NW40 NW40
Approx. Power at Ultimate Pressure kW 0.4 0.4 0.4 0.4 0.55 0.55 0.65 0.65 0.75 0.75
Cooling water Flow rate L/min 1.5~3.0 1.5~3.0 1.5~3.0 1.5~3.0 2.0~3.0 2.0~3.0 2.0~3.0 2.0~3.0 2.0~3.0 2.0~3.0
Temperature ℃ Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30
N2 Flow rate Pa•m3/s - 17～20 (2.4) - 17～20 (2.4)   17～20 (2.4)   17～20 (2.4)   17～20 (2.4)
Power Supply
Phase/Volt/Freq.		 200V Models   3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz
400V Models   3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz - - 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz
Power capacity kVA 3.2 3.2 3.6 3.6 4.8 4.8 6.4 6.4 6.8 6.8
Weight kg 60 60 90 90 100 100 120 120 170 170

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EBARA PRECISION MACHINERY MALAYSIA SDN. BHD. Semiconductor Manufacturing Equipment Malaysia, Dry Vacuum Pump Supplier Penang, Chemical Mechanical Polishing System ~ EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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