This is a lightweight, compact vacuum generator suitable for semiconductor equipment and high-speed drive equipment.
The responsiveness of the vacuum generating valve has been improved to the highest level, realizing high cycling of the vacuum system.
There are two types of fixing methods: direct mounting using the main body mounting hole and DIN rail mounting type that can be mounted on a DIN rail, so you can choose the product that suits your intended use.
Vacuum sensors include LED-display digital sensors and inexpensive analog sensors.
Manifold combination specifications can be combined up to 10 stations.
Specifications have been added for fields that require products that do not use copper-based metals and are compatible with low-concentration ozone.
