○Main specifications
0鸖tage movement: X200mm, Y200mm
0鸖ubstage movement amount: X13mm, Y13mm
0鸖ample table rotation: 180 degrees of coarse movement, 10 degrees of fine movement
0鸓robe and carrier travel distance: 0~25mm
0鸓robe and carrier UP/DOWN stroke: Separade 400μm from contact
0鸆huck size: ~8 inches (φ200mm)
0鸚afer holding method: Vacuum suction method
0鸓rober external dimensions: Approximately W450 x D550 x H600mm
