DISCO DCS 141 is a wafer and mask scrubber designed to provide superior cleaning of wafer surfaces. It is an all-in-one system that can be used for multi-step scrubbing and drying processes. DISCO DCS141 has a unique design with an integrated scrubber arm that is designed to efficiently and uniformly scrub the wafer surface. It is equipped with a cleaning arm with three heads to ensure even scrubbing and avoid scratching the wafer surfaces. The wafer carriers are designed to be safe and easy to unload and remove from the scrubber. The scrubbing process is automated with a programmed profile so that the process is repeatable and reliable. DCS 141 uses a vapor phase degassing system to ensure that the wafer is completely free of any moisture or surface contaminants.
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