■Chemical type that is resistant to exhausting corrosive gases
■Structure that is resistant to unexpected atmospheric entry
■ Strong against external shocks
■Serial communication possible
■Safety standards
NRTL/SEMI-S2/CE
0鸖emiconductor manufacturing
0鸈lectron gun exhaust, ion source exhaust
0鸉PD manufacturing
0鸖urface treatment, surface modification
0鸐anufacturing various electronic components
0鸗ube manufacturing, optical parts manufacturing
0鸄ccelerators, radiation facilities, nuclear fusion research
·Heat treatment
·Research and Development
