The GB4S Robot System is a high precision 300mm wafer handling robot that offers superior performance for tool automation applications requiring standard payload and throughput requirements.
Identical in size to Genmark’s original GB4 robot, the GB4S features many design enhancements that result in improved robot performance and reliability. Engineered for single or dual wafer transport, the GB4S robot is available in various reach and vertical stroke combinations.
The GB4S Robot System used in conjunction with the RPA-0 Remote Pre-aligner, provides a highly accurate, highly repeatable pre-alignment and transport system for wafers and reticles. It includes the handling of “thin wafers” through specially designed end-effector paddles and aligner chucks, lifting pins, along with dedicated motion control software, to assure reliable material handling while overcoming increased wafer sag and fragility. The option of a flipping end-effector is also available.
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