E-1000

VARIAN E1000 is a versatile ion implanter and monitor, providing highly reliable performance for any application that requires precise and accurate implantation into materials. The standard equipment consists of a powerful 60 kV implanter, a detection system, and a high accuracy beam characterization module. The implanter combines excellent uniformity and dose control with excellent beam spot accuracy, while the detection unit features dynamic response over a wide range of doses. The high accuracy beam characterization module ensures accurate implantation of all ions, ensuring optimal accuracy throughout the process. VARIAN E-1000 also features a safe guard machine to protect the target from potential damage due to an overload or fault. E 1000 is equipped with a comprehensive data capturing software, which allows for remote monitoring and analysis.