详情
The FYRA Pirani & Piezo Vacuum Gauge (SmartSENS) is a high vacuum gauge that combines DPP Quantum gauge with Digivac’s innovative FYRA. The DPP combines quantum pirani with piezo technology, and has a measurement range of 7.5 x 10-6 Torr to 1000 Torr.
Vacuum Science Simplified
We know vacuum applications can get complicated. FYRA was created to deliver scientific measurement and vacuum control simply with easy integration into almost any system in the market.
FYRA Features:
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Easy integration into systems
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Capable of driving multiple types of sensors (ex. piezo, thermal, active, passive, and capacitance manometers)
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Has touchscreen and dial interface
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Intuitively display and manage multiple sensors + control points
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Comes standard with:
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10 Volt DC output for PLC integration
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USB for data download + documentation of vacuum processing data-points
DPP Quantum Sensor
The DigiVac
DPP Quantum Gauge is an ultra wide range vacuum sensor that combines the novel Quantum pirani with piezo technology.
The DPP transducer uses an innovative proprietary approach to active temperature compensation and calibration that provides an ultra-stable zero-point. This technology not only enables a reliable, wide dynamic range – it also eliminates the need for frequent user re-zeroing due to zero-point drift commonly known from legacy Pirani and convection gauges. The active temperature compensation also compensates for measurement signal errors introduced by fluctuations in the ambient temperature.
Sensor Details:
Measurement Range: 7.5 x 10 -6 to 1000 Torr
Accuracy Specifications:
1000 Torr to 5 Torr = +/- 3%
4.99 Torr to 10-5 Torr = +/- 14%
10-5 to 10-6 Torr = +/- 50%
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Combines quantum pirani with piezo technology
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0-10 Volts analog out for PLC integration
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RS232
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Includes one solid state relay for process control
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Piezo + patent-pending Pirani technology with advanced signaling processing, which extends measurement range up to 3 decades. Read 9 decades of vacuum (10-6 to 1000 Torr) all with one gauge.
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Ideal for Clean Processes: 1000 Torr down to 10-6 Torr with no ion gauge required
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Has an integrated baffle to protect and extend life of sensor
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The Quantum DPP is electrical equivalent to the Pfeiffer PKR 251 comes standard with KF16 flange. Can easily be adapted to KF25.
Applications:
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Mass spectrometers
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Scanning electron microscopes
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Furnace heat treatment
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PVD coating of glass, optics, tools, etc.
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Refrigeration service and manufacturing
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Semiconductor processing
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Units |
Torr, mbar, kPa, Pa, microns (choose mTorr), millitorr (mTorr), mmHg, Hectopascal |
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Measurement Range |
7.5 x 10-6 to 1000 Torr |
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Dimensions |
6.5″x6.5″x2.5″ |
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Telemetry Options |
USB, WiFi (optional , not included call to place order with wifi), 0-10 volts DC, Analog out, 0-10 volts DC Analog in |
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