Turbo-V 551 Navigator

Turbo-V 551 Navigator

分类: Turbo Pumps 当前有货
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详情

The Turbo-V 551 Navigator turbomolecular vacuum pump with MacroTorr drag technology delivers high compression ratios, high throughput, and high discharge pressures for a wide-range of high vacuum applications.  The unique bearing and permanent dry lubrication in the V 551 eliminate oil and maintenance, and permit operation of the pump in any orientation.  Agilent (formerly Varian) offers the V 551 with Navigator on-board controllers with integrated electronics, or with standard rack controllers for simple installation.  The Turbo-V 551 is available for sale in system packages with controller, inlet screen, and power cables included, or as stand-alone pumps.  A version optimized for scanning electron microscopes produces minimal vibration and the lowest magnetic signature available.

Features

  • MacroTorr drag technology allows higher foreline pressure, higher efficiency and smaller backing  pumps, in a compact, economical package
  • Pump ceramic bearings are permanently lubricated due to the extremely low vapor pressure of the solid lubricant
  • Pump can be mounted and operated in any position
  • No maintenance, no oil, no refill, and no contamination
  • Precise thermal design reduces heat dissipation and power consumption
  • Navigator on-board controllers provide plug-and-pump operation, or rack controller option matches your current system architecture
  • T-plus software option runs on your PC to allow remote operation and performance monitoring
  • SEM version use superior vibration isolation system to outperform mag-lev pumps, and has the lowest magnetic signature of any pump in its class
  • Typical Turbo Pump Applications

Specifications

Pumping Speed
   CFF 6”
   CFF 8” or ISO 160
N2
350l/s
550l/s
He
450l/s
600l/s
H2
450l/s
510l/s 
Compression Ratio 1 x 109 1 x 107 1 x 106
Base pressure (with recommended forepump) <1 x 10-10 mbar (<1 x 10-10 Torr)
Inlet Flange Options CFF 6”; CFF 8”; ISO 160; ISO 160-F bolted
Foreline Flange KF25
Rotational Speed 42,000 rpm
Start-up Time <5 minutes
Recommended Forepumps Agilent TS300 Dry Scroll Pump;
Agilent DS-302 Rotary Vane Pump
Operating Position Any
Cooling Requirements Natural air convection; 
Water optional (use water with electrical conductivity = 500 µS/cm)
Bakeout Temperature 120oC at inlet flange, maximum (CF Flange);
80oC at inlet flange, maximum (ISO Flange)
Vibration Level (displacement) <0.01 µm at inlet flange
Weight, kg (lbs) ISO Flange: 19.4 (43.0);
CF and ISO Bolted Flange: 23.4 (51.6)  


 

Product Numbers:
9698922
9698944
9698925
9698923

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