SH-110

The Agilent SH-110 is a dry, hermetic scroll pump with industry-leading features designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump has a pumping speed of 110 liters/minute (on 60 Hz power) and an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is ideal for many end-user applications.

The SH-110 pump conforms to European Union directives (CE), Canadian Standards Authority (CSA), and Semi S2-0200 requirements.

• Low-temperature operation
• ¼-horsepower motor for low power consumption
• Built-in exhaust valve for low noise levels
• Moveable exhaust port for flexibility in tight spaces
• High pumping speed (110 liters/minute) at high pressure for fast pumpdown
• Lightweight; convenient carrying handle
• Built-in fail-safe isolation valve protects the vacuum system
• Universal 100-230 VAC power for easy installation worldwide

Technical Specifications

Peak pumping speed (60 Hz)	110 L/m, 6.6 m³/hr, 4.0 cfm
Peak pumping speed (50 Hz)	90 L/m, 5.4 m³/hr, 3.3 cfm
Ultimate pressure	5.0 × 10-2 torr (6.6 × 10-2 mbar)
Maximum inlet pressure	1 atmosphere (0 psig)
Maximum outlet pressure	1.5 atmosphere (7.5 psig)
Inlet connection	NW25 KF flange
Exhaust connection	1⁄4-in. female nat’l pipe thread
Exhaust connection adapter	NW16 KF adapter provided
Gas ballast connection	1⁄8-in. female nat’l pipe thread
Ambient operating temperature	5 to 40 °C (41 to 104 °F)
Storage temperature	–20 to 60 °C (–4 to 140 °F)
Motor rating	0.25 horsepower (0.19 kW)
Supply power	1 phase, 50-60 Hz, 100-115/200-230 VAC
Motor thermal protection	Automatic
Rotation speed	1725 RPM at 60 Hz 1425 RPM at 50 Hz
Cooling	Air-cooled
Weight	19.5 kg (43 lbs)
Restrictions	No corrosive, explosive, or particulate-forming gases
Leak rate (exhaust sealed)	<1 × 10-7 std-cc/sec helium
Compliances	Conforms with CE, CSA, and Semi S2-2000

Pumping Speed Graph


Outline Drawing