Turbo Pumps
Order Information
9699344 | Vibration Isolator ISO 100 |
9699302 | Inlet Screen CFF 6” |
X3500-68000 | Inlet screen ISO 100 |
9699347 | Metric Water Kit 4 x 6 mm |
9699304 | Inlet Screen CFF 8” |
X3500-68001 | Inlet Screen ISO 160 |
X3513-68000 | KF25 Foreline flange |
9699345 | Vibration Isolator ISO 160 |
9699334 | Vibration Isolator CFF 6” |
9699337 | Water Cooling Kit for Turbopump |
9699232 | Purge valve 10 SCCM ¼ Swagelock - ¼ Swagelock |
9699239 | Purge valve 10 SCCM NW16KF - M12 |
9699241 | Purge valve 20 SCCM NW16KF – M12 |
9699240 | Purge valve 10 SCCM ¼ Swagelock - M12 |
9699242 | Purge valve 20 SCCM ¼ Swagelock - M12 |
9699236 | Purge valve 20 SCCM ¼ Swagelock - ¼ Swagelock |
9699335 | Vibration Isolator CFF 8” |
X3500-68011 | Air cooling kit for TwisTorr 305 remote controller |
9699845 | Vent Valve N.O. 1.2 mm Orifice |
9699846 | Vent Valve N.C. 1.2 mm Orifice |
9699844 | VENT VALVE N.O. 0,5 MM ORIFICE |
9699940 | 5 m Small TMP Air Cooling Kit Extension Cable |
X3513-64008 | TwisTorr 305 FS ISO100 air cooling |
X3513-64009 | TwisTorr 305 FS CFF6, air cooling |
X3513-64010 | TwisTorr 305 FS ISO160 air cooling |
X3513-64011 | TwisTorr 305 FS CFF8, air cooling |
X3513-64012 | TwisTorr 305 FS ISO100 wat cooling |
X3513-64013 | TwisTorr 305 FS CFF6, wat cooling |
X3513-64014 | TwisTorr 305 FS ISO160 wat cooling |
X3513-64015 | TwisTorr 305 FS CFF8, wat cooling |
Features
Specifications
Technical Specifications | ||||
Pumping speed | ISO 100 K / CFF 6”/ ISO 160 K / CFF 8” | |||
N2 He H2 Ar |
250 L/s 255 L/s 220 L/s 250 L/s |
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Max gas flow rate | ||||
N2 | 250 SCCM | |||
Compression ratio | ||||
N2 He H2 Ar |
> 1 x 1011 > 1 x 108 1.5 x 106 > 1 x 1011 |
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Max foreline pressure tolerance N2 | 12 mbar | |||
Base pressure with recommended forepump |
<1 x 10 -10 mbar (<1 x 10 -10 Torr) |
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Inlet flange | ISO 100 K, CFF 6”, ISO 160 K, CFF 8” | |||
Foreline flange | KF16 NW (KF25 - optional) | |||
Rotational speed | 60000 rpm (1010 Hz driving frequency) | |||
Start-up time | < 3 minutes (longer when soft start is used) | |||
Recommended forepump |
Dry pumps: IDP-3 (no gas flow), IDP-7, IDP-10, Mechanical: DS102, DS302 |
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Operating position | Any | |||
Oper. ambient temperature | +5 °C to +35 °C | |||
Bakeout temperature | Max 80 °C at inlet flange | |||
Lubricant | Permanent lubrication | |||
Cooling requirements | ||||
Air cooling |
Natural convection (only with no gas load) Forced air (5- 35 °C ambient temperature) |
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Water cooling |
Minimum flow: 50 l/h (0.22 GPM) Temperature: +15 °C to +30 °C Max pressure: 5 bar (75 psi) |
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Noise pressure level (at 1m at full speed) |
41 dB(A) | |||
Storage temp. | -40°C to +70°C | |||
Weight kg (lbs) TwisTorr 305 FS |
ISO 100 K 5,84 kg (12,8) CFF 6’’ 8,16 kg (17,9) ISO 160 K 6,28 kg (13,8) CFF 8’’ 10.43 kg (22.9) |
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Compliance with: |
EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/EU Directive 2011/65/EU |
Literature