UL3000 Fab Series

Specifically designed for the needs of leak checking in semiconductor applications.

It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

• Faster pump down (evacuation) times due to higher air pumping speed.
• Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
• Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
• The UL3000 Fab ULTRA offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

FAST RESULTS

The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.

ROTATABLE DISPLAY AND REMOTE CONTROLLABLE USER INTERFACE

The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

SLIM DESIGN FOR ADVANCED MANEUVERABILITY

A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.

Advantages

• Save Time with I·CAL software algorithm for fast measurements in the range of 10^-9 to 10^-12 mbar·l/s
• Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
• Applicable for vacuum and sniffer leak search
• Minimize leak checking efforts through quick evacuation and response time
• Time saved by easy maneuverability through slim design
• Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
• Easy to use, operator-guided HMI with full color high resolution rotatable display
• UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
• UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
• UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
• UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

Typical Applications

• Semiconductor Fabs
• Flat Panel Display manufacturing
• Solar Cell fabrication
• Glass and Web (roll to roll) coating
• General vacuum coating & applications