The Agilent CDG-500 series of temperature compensated Capacitance Diaphragm gauges provides a high level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 Torr to 1 Torr. The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warm-up times and unparalleled robustness.
Technical Specifications
Measurement range (full scale) | Torr | 1000 | 100 | 10 | 1 | |||
Pa | 133,322 | 13,332 | 1,333 | 133 | ||||
mbar | 1333 | 133 | 13.3 | 1.3 | ||||
% of reading | 0.2 | 0.2 | 0.2 | 0.2 | ||||
Temperature effect On zero |
On zero | % F.S. / °C | 0.005 | 0.005 | 0.005 | 0.015 | ||
On span | % of reading/ °C | 0.01 | 0.01 | 0.01 | 0.01 | |||
Resolution | % F.S. | 0.003 | 0.003 | 0.003 | 0.003 | |||
Pressure, maximum | kPa (absolute) | 400 | 260 | 260 | 260 | |||
Lowest reading | % F.S. | 0.01 | ||||||
Lowest suggested reading | % F.S. | 0.05 | ||||||
Lowest suggested control pressure | % F.S. | 0.05 | ||||||
Temperature | Operation (ambient) |
Bakeout (at flange)2 |
Storage | |||||
5 to 50 °C | <110 °C | –40 to 65 °C | ||||||
Supply voltage | 14 to 30 VDC | |||||||
Power consumption | <1 W | |||||||
Output signal (analog) | 0 to 10 VDC | |||||||
Response time | 30 ms | |||||||
Degree of protection | IP30 | |||||||
Electrical connection | D-sub, 15 pole, male | |||||||
Setpoints3 – Two (2) setpoints, SP 1 and SP 2 | Relay Contact | Hysteresis | ||||||
30 VDC; <0.5 ADC | 1% of F.S | |||||||
Materials exposed to vacuum | Aluminum oxide ceramic (Al2O3), Vacon 704, stainless steel (AlSl 316L5) AgCuTi hard solder, sealing glass |