MarSurf LD 130 / LD 260. A step into a new dimension
Combined contour and roughness measurements in just one step comes courtesy of proven cutting edge technology from Mahr metrology. The MarSurf LD 130 and MarSurf LD 260 measuring stations have been systematically developed to draw on the experience from the first generation of equipment.
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Resolution
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0.8 nm
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Start of traversing length (in X)
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0.1 mm
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End of traversing length (in X)
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130 mm
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Positioning speed
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0.02 mm/s to 200 mm/s
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Measuring speed
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0.02 mm/s to 10 mm/s;
for roughness measurements 0.1 mm/s to 0.5 mm/s is recommended |
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Measuring range mm
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13 mm (100 mm probe arm) |
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Traversing lengths
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0.1 mm - 130 mm
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Measuring force (N)
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0.5 mN to 30 mN, software adjustable
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