Ion CombiNEG pumps combine the state-of-the-art Agilent (formerly Varian) ion pump technology with the SAES Non-Evaporable Getter (NEG) sintered cartridge. These combination ion pumps with sintered NEG cartridges provide enhanced pumping speed for getterable gases, methane, and noble gases and reach pressures as low as 10-12 mbar.
The easy insertion of the NEG cartridge into the ion pump makes the Ion CombiNEG pump a smart solution, combining ion pump and NEG cartridge technologies in the same pump volume.
Agilent offers 3 Ion CombiNEG pump configurations based on pump and cartridge sizes: 40-400, 150-1000, 150-2000.
The most typical applications include
• Particle accelerators
• Synchrotron radiation sources and related equipment
• Surface science
• Scanning Electron Microscope (SEM)
• General ultrahigh vacuum (UHV) and extreme-high vacuum (XHV) applications
Features
StarCell Element
Optical shield to protect NEG cartridge against titanium sputtering
Vacuum Firing treatment to ensure minimum outgassing rate
Optimized magnetic field for the lowest attainable ultimate pressure
Side or bottom port to allow the insertion of the sintered NEG cartridge
Extra high pumping speed at low pressure for active gases
Compact and light design
Able to reach pressure below 10-12 mbar
Order Information
X3605-68020
CF35 base flange, with connector
X3605-68010
D400-2 NEG Cartridge, with heater
X3606-64041
Ion CombiNeg 40-400 pump, StarCell, with heater, 230 V
X3605-68050
Cable (controller to cartridge) for NEG Cartridge D400-2, 3 m
X3606-64060
Ion CombiNEG 150-1000/2000 pump, StarCell, with heater, 115V
X3606-64061
Ion CombiNeg 150-1000/2000 pump, StarCell, with heater, 230 V
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