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Vacuum Range |
Gauge Type |
Gauge Characteristics |
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Rough Vacuum - Atmosphere to 10-3 mbar |
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PVG-500 Micro Pirani Gauge |
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Compact, rugged aluminum housing that mounts in any orientation with a logarithmic signal output
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Stainless steel sensor cell with metal-sealed feedthrough provides a rugged design for a wide range of applications
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Push button ATM and High Vacuum (HV) adjustment is easy to set-up
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Nickel filament option provides a solution for corrosive applications
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Optional set points use pressure readings to trigger critical operations
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CDG-500 Capacitance Diaphragm Gauge |
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Full scale ranges from 1 to 1000 Torr with push button zeroing and optional set point control
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Excellent long term signal stability and repeatability deliver long term performance comparable to heated versions
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Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
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Corrosion resistant ceramic sensor with sensor shielding protection
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PCG-750 Pirani/Capacitance Diaphragm Gauge |
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High accuracy and reproducibility at atmosphere
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Fast atmospheric detection shortens process cycle times
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Gas-type independence above 10 mbar allows safe venting with any gas mixture
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Compact, rugged housing that mounts in any orientation with a logarithmic signal output
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Set point control uses pressure readings to trigger critical operations
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Exchangeable plug and play sensor is easy to repair and lowers cost of ownership
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Nickel filament option provides a solution for corrosive applications
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Bright color LCD display option makes pressure easy to monitor
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Full Range Gauges - Atmosphere to 10-10 mbar |
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FRG-700/702 Pirani/Inverted Magnetron Gauges |
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Provides two measuring technologies in a single, compact, economical package
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Measures process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere)
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A single, compact unit with one logarithmic analog output signal significantly reduces complexity of installation, setup and integration
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Ideal for high vacuum pressure monitoring, base pressure for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range
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Wide measurement range from 5 x 10-9 mbar to atmosphere
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No filament to burn out
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Excellent ignition properties
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Easy to clean
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FRG-720/730 Pirani/Bayard-Alpert Gauges |
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Combination gauge – Bayard-Alpert and Pirani provides a wide measurement range from 5 x 10-10 mbar to atmosphere
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Long-life yttrium oxide coated iridium filament provides a rugged design for a wide range of applications
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Pirani interlock protects Bayard-Alpert sensor from premature burnout and contamination effects from high pressure operation
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Set point control uses pressure readings to trigger critical operations
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LCD display option makes pressure easy to monitor
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Profibus communication option allows easy network integration
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