★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.
★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
★ 3D CMM- Ensure the quality and precision of the stage.
|
Model no |
Travel stroke (mm) |
Loading (kgf) |
|
GAU05-RSD |
±5x±5 |
117 |
|
GAU05-RSS |
±5x±5 |
117 |
|
GAU05-CCD |
±5x±5 |
64 |
|
GAU05-CCS |
±5x±5 |
64 |
