Agilent is pleased to offer Series 54 All-Metal Ultra High Vacuum Valves in partnership with VAT. These valves are specially designed for use in ultra-high vacuum systems where bake-out temperatures up to 300º C preclude the use of elastomers and low melting temperature metals. The valves are manually operated with a standard Hex wrench, so no Torque Wrench is required. Thanks to the “hard-on-hard” metal seals, these valves can be operated thousands of times before requiring maintenance. Series 54 valves require very little maintenance with maximum reliability and vacuum sealing from atmospheric pressure to below 10-11 torr (mbar).
| Leak rate: valve body, valve seat | < 1 x 10-10 mbar Is-1 |
| Pressure range | XHV to 2 bar (abs) |
| Differential pressure on the gate | ≤ 2 bar |
| Differential pressure at opening | ≤ 1 bar 1 |
| Lifetime | ≥ 1000 cycles |
| Bake-out temperature 2 | ≤ 300 °C open and closed |
| Heating and cooling rate | = 60 °C h-1 |
| Material: valve body, mechanism, bellows | AISI 316L (1.4404, 1.4435) |
| Seal: bonnet, plate | metal |
| Feedthrough | bellows |
| Mounting orientation | any |
| Valve position indication | visual (mechanical) |
| Conductance (molecular flow) | NW 16: 5 ls-1 / NW 40: 50 ls-1 |
| Closing force | closes at a mechanical stop |
| Weight: kg (lbs) |
NW 16: 0.4 (0.9)
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1) > 1 bar with reduced number of cycles
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