详情

Agilent TwisTorr 404 FS Turbo Pump

The TwisTorr 404 FS offers 400 L/s pumping speed in DN100 installations, high compression ratios for light gases, and features the trademarked Agilent floating suspension (AFS), ensuring low vibration and noise level for compatibility with sensitive environments. The high compression ratios, high foreline pressure tolerance, and maintenance-free operation make the TwisTorr 404 FS a high-performance, reliable, and low-cost-of-ownership pump to operate.

The 404 FS is an excellent choice for UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics applications. The pump’s smart controller automatically optimizes pump performance according to system needs.

The Agilent 400 L/s medium turbo pump, TwisTorr 404 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability, and economy. This 400 liter turbomolecular pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.

The TwisTorr 404 FS is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics.

Agilent also provides TwisTorr FS-OS turbo pumps, designed for academia, research, and other applications that require long-term operation in demanding conditions.

The TwisTorr 404 FS is available with onboard or rack controllers.

View the image gallery to learn more about the TwisTorr 404 FS Turbo Pump.

Features

High compression ratios for light gases and capability to manage high gas flow, enabling operation in low base pressure and high-throughput applications with 400L/s pumping speed within a DN100 flange
Hydrocarbon free for clean vacuum system
Remote controller allows operation from 100 m away.
Low vibration and noise levels—43 dB(A)—for a comfortable working environment and operation in sensitive experiments
Compact size and installation in any position allow easy integration
Maintenance-free bearings for zero operating cost
Ready for wireless control via Vacuum Link app for pump operation on the go
Radiation and magnetic field-proof design with no embedded electronics allows operation in demanding magnetic field and radiation environments
Low electromagnetic emission guarantees no interferences with application process
Pump control software provides maximum flexibility, speed, and simplicity—always the best throughput and compression performance according to pump operative conditions
Innovative TwisTorr technology - high compression ratio for light gases, such as Helium and Hydrogen, provides high performance and minimal system footprint.
High foreline tolerance - permits use of smaller backing pump, thereby reducing system cost and size.
Agilent Floating Suspension - low vibration and acoustical noise, as well as optimal bearing working conditions, extend operating life to optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
Unique bearing and dry lubrication - maintenance free, oil-free; allows installation in any orientation.
“Three dimensional” pump control software provides maximum flexibility, speed, and simplicity - for the best throughput and compression performance according to the operating conditions of the pump.
Typical Turbo Pump Applications
Download 404 FS 3D Models

Specifications

Ambient Operating Temperature	+5 to +35 °C
Ambient Storage Temperature	-40 to +70 °C
Base Pressure	<1 x 10-10 mbar
Compression Ratio H2	3 x 106
FlangeType	DN 100
Foreline Flange Size	KF 25 NW
Foreline Tolerance - N2	10 mbar
Maximum Gas Throughput - Ar, Water Cooling	3.3 mbar L/s; 195 sccm
Maximum Gas Throughput - N2, Water Cooling	6.2 mbar L/s; 367 sccm
Noise Level	43 dB(A)
Nominal Rotation Speed	From 40.8 to 49.5 KRPM
Operating Position	Any
Pumping Speed - Ar	340 L/s
Pumping Speed - H2	415 L/s
Pumping Speed - He	505 L/s
Pumping Speed - N2	380 L/s
Recommended Forepump Capacity	10 m³/h
Standards and Certifications	61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU
Start Up Time	< 5 min
Weight	22.6 kg

Technical Specifications
Pumping speed:	ISO 100K / ISO 100F / CFF 6''
N2 He H2 Ar	380 L/s 505 L/s 415 L/s 340 L/s
Max Gas *Throughput ()**	Air Cooling (25°C ambient temperature)	Water Cooling (15 °C water temperature / 25 °C ambient temperature)
N2	4.3 mbar L/s 255 SCCM	6.2 mbar L/s 367 SCCM
He	7.9 mbar L/s 467 SCCM	10.4 mbar L/s 615 SCCM
Ar	1.5 mbar L/s 89 SCCM	3.3 mbar L/s 195 SCCM
(*) Backing pump 11.6 m3/hr
Compression ratio and foreline tolerance*
N2 He H2 Ar	>1 x 1011 2 x 108 3 x 106 >1 x 1011	10 mbar 10 mbar >4 mbar 8.5 mbar
(**) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode
Base pressure with recommended forepump	< 1 x 10-10 mbar (< 1 x 10-10 Torr)
Inlet flange	ISO 100K, ISO 100F, CFF 6”
Foreline flange	NW25 (NW16 as optional accessory)
Rotational speed	Auto setting from 40800 RPM to 49500 RPM
Start-up time	< 5 minutes
Recommended forepump	Agilent DS302 Rotary Vane Pump Agilent IDP-10 Dry Scroll Pump Agilent IDP-15 Dry Scroll Pump
Operating position	Any
Oper. ambient temperature	+5 °C to +35 °C
Relative humidity of air	0 to 90% (not condensing)
Bakeout temperature	ISO pump: 80°C at inlet flange CFF pump: 120°C at inlet flange
Lubricant	Permanent lubrication
Cooling requirements
Air cooling	Air temperature from +5°C to 35°C
Water cooling	Water temperature from +15°C to +25°C Water flow min. 100L/h
Noise Pressure Level (at 1m at full speed)	43dB(A)
Storage temperature	-40 °C to +70 °C
Max altitude	3000 m
Weight kg (lbs)	ISO100K ISO100F CFF 6''	22.6 kg (49.8) 23.7 kg (52.3) 23.5 kg (51.8)

Conformity to norms
EMC (Control Units) Safety (CE/CSA) Machinery Directive Low Voltage Directive EMC Directive (Control Units) ROHS	61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU

Ordering Information

Pumps                                                                                    Configuration Options
TwisTorr 404 FS ISO100K KF25 air cooling                           X3511-64004
TwisTorr 404 FS ISO100F KF25 air cooling                           X3511-64005
TwisTorr 404 FS CFF6'' KF25 air cooling X3511-64006
TwisTorr 404 FS ISO100K KF25 water cooling X3511-64019
TwisTorr 404 FS ISO100F KF25 water cooling                      X3511-64020
TwisTorr 404 FS CFF6'' KF25 water cooling                          X3511-64021

Controllers                                                                            Part Numbers
TwisTorr Medium-TMP Rack Controller X3501-64016
TwisTorr Medium-TMP on board Controller X3512-64016

			QTY
X3511-64004	TwisTorr 404 FS Turbo Pump, ISO 100K, Air Cooling	1 Each	Quantity
X3511-64005	TwisTorr 404 FS Turbo Pump, ISO 100F, Air Cooling	1 Each	Quantity
X3511-64006	TwisTorr 404 FS Turbo Pump, CFF 6, Air Cooling	1 Each	Quantity
X3511-64019	TwisTorr 404 FS Turbo Pump, ISO 100K, Water Cooling	1 Each	Quantity
X3511-64020	TwisTorr 404 FS Turbo Pump, ISO 100F, Water Cooling	1 Each	Quantity
X3511-64021	TwisTorr 404 FS Turbo Pump, CFF 6, Water Cooling	1 Each	Quantity
X3511-64036	TwisTorr 404 FS Turbo Pump, One Speed, CFF6 inlet flange, air cooling, KF25 foreline flange	1 Each	Quantity
X3511-64039	TwisTorr 404 FS Turbo Pump, One Speed, ISO100K inlet flange, water cooling, KF25 foreline flange	1 Each	Quantity
X3511-64051	TwisTorr 404 FS Turbo Pump, One Speed, CFF6 inlet flange, water cooling, KF25 foreline flange	1 Each	Qua

Literature

Brochures: Agilent TwisTorr FS Turbo Pumps

Learn about the expanded TwisTorr FS turbo pumps family of compact, reliable, energy-efficient, best-in-class pumps that incorporate breakthrough technologies for outstanding performance and quality
Data Sheets: Agilent TwisTorr 404 FS Data sheet

Technical specifications and ordering information on the TwisTorr 404 F

Agilent TwisTorr FS-OS Turbo Pumps data sheet

Technical specifications and ordering information on the TwisTorr FS-OS (One Speed) turbomolecular pumps
Software: LabVIEW Drivers

LabVIEW Drivers for the Agilent turbo pumps

A-PLUS software release 2.0.2

A-PLUS software (formerly T-plus) - release 2.0.2 - communication, control and monitoring software designed to leverage the intelligence of Agilent vacuum products. 2 versions: 32-bit and 64-bit versions of Windows.

Support

FAQs

Frequently Asked Questions (FAQs) Turbomolecular Pumps

User Manuals

Turbomolecular Pump Installation and Flange Fastening Handbook (Quick Guide)

Turbomolecular Pump Installation and Flange Fastening Handbook (Quick Guide

TwisTorr 404 FS user manual

Instructions for use and technical specifications for the TwisTorr 404 FS

Tools

Download 3D Models TwisTorr 404 FS

STEP file models

Download 3D Model Medium TMP Rack Controller

STEP file models

Download 3D Model Medium TMP Onboard Controller

STEP file models

Services

Vacuum Technology Application & Training

Let Agilent vacuum experts help you discover better solutions for your application or train you on vacuum and leak detection concepts and theory. Our Application Engineers combine expertise in vacuum systems and design with experience in industry and research ...

Vacuum Product & Leak Detector Services

Turbo Pump Advance Exchange Service

Having trouble with your turbo pump? We have a solution. Agilent turbomolecular pump Advance Exchange service offers remanufactured pumps built to the same specifications as new pumps.|The main advantage is speed: Agilent maintains stock of the most popular ...

Vacuum Product & Leak Detector Services

Turbo Pump Repair

Agilent offers a full repair service for your Agilent or Varian turbomolecular pump. Our factory-trained technicians rebuild pumps using only genuine Agilent parts, so that they meet the same quality and performance standards as new turbo pumps.| The service is available for ...

Vacuum Product & Leak Detector Services

Turbo & Scroll Pump Service Contracts

Agilent turbo and scroll pump contracts maximize uptime while providing fixed costs for easier financial planning. Enjoy the peace of mind that your product is covered and you will not incur any unplanned maintenance costs during the term of the contract. If an issue ...

Vacuum Product & Leak Detector Services

Turbo Pump & Remote Controller Upgrades

Agilent supports customers with cost-effective upgrade paths to the newest Agilent TwisTorr turbomolecular pumps. Avoid the delays and long turn-around times involved with repairing discontinued products by upgrading today. Trade-in your existing equipment and take ...