详情

NHS-35 Diffusion Pump

The Agilent NHS-35 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 50,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 35 in. ASA or ISO 1000F (bolted) inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Features

Five-stage fractionating jet purifies pumping fluid
Fill and drain assembly allows for easy exchange of pump fluid
Robust boiler design
Stable and reliable under widely varying operation conditions
High forepressure tolerance
Low ultimate pressure
High throughput with high pumping speed
Fluid level sight glass provides quick indication of pump fluid status at all times

Specifications

Backstreaming Rate	5 x 10-4 mg/cm²/min
Cooldown Time	60 min
Electrical Requirements	50/60 Hz 240/415/480 V
Fluid Charge	11356 CC
Fluid Type	Oil
Input Voltage	240, 415, 480 V
Maximum Forepressure - Full Load	0.40 Torr 0.52 mbar
Maximum Forepressure - No Load	0.55 Torr 0.71 mbar
Maximum Throughput	25 T-L/s (33 mbar-L/s)
Operating Range	9 x 10-4 to < 5 x 10-8 Torr 1.2 x 10-3 to < 6.5 x 10-8 mbar
Pump Power	24000 W
Pump Weight	1500 lbs 680.4 kg
Pumping Speed - Air	28000 L/s
Pumping Speed - Air, via AVS 4.1 (1963)	50000 L/s
Pumping Speed - He/H2	35000 L/s
Recommended Backing Pump	≥ 300 cfm (510 m3/hr)
Warmup Time	60 min
Water Connections	3/8 inch FPT
Water Cooling - Temperature Requirement	60-80 °F 15-26 °C
Water Cooling Flow Requirement	4.0 gpm 800 L/hr

Ordering Information

Description   Voltage   Weight kg (lbs) Part Number
Flange Type
NHS-35 Pump   ASA     ISO
NHS-35 with standard cold cap          240 V               680.0 (1,550.0) F1730308 L5924308
NHS-35 with halo baffle 240 V               680.0 (1,550.0) F1730318 L5924318
NHS-35 with standard cold cap          480 V               680.0 (1,550.0) F1730309 L5924309
NHS-35 with halo baffle 480 V               680.0 (1,550.0) F1730319 L5924319

Accessories Weight kg (lbs)                        Part Number
Water-cooled halo baffle 20.0 (45.0)                               K1857335
Quick cool coil – 0.5 (1.0)                                   IC200SV
must be installed in the factory,
can not ship separately Factory Special
Centering ring for ISO foreline flange, 200K

O-ring, ISO Inlet flange 0.5 (1.0)                                   78536002
Installation and Operation Manual 699901140

Replacement Parts (six heaters required per pump)

Heater 4000 W, 240 V/480 V with 0.5 (1.0)                                   647335010
leads
Heater 4000 W, 240 V/480 V with 0.5 (1.0)                                   647235248
no leads – used on pumps built before May ‘90
Heater, 4000 W, 200 V 0.5 (1.0)                                   647335020
Heater, 4000 W, 400 V 0.5 (1.0)                                   L6383010
Heater, 4000 W, 440 V 0.5 (1.0)                                   L6383011
Heat shield (reusable) 0.5 (1.0)                                   L6370001

Heater clamping plate 4.0 (8.0)                                   F1749001
(six required per pump)

Heater insulator 0.5 (1.0)                                   L9699001
(one required per pump)

HS-32/35 heater wire, 10 AWG, 1.0 (0.4)                                   X3900-68003
196 inches (2 per heater required)

Replacement o-ring kit for ASA 0.5 (1.0)                                   K0377169
pumps (kit contains: 1 inlet flange
o-ring (buna 78536001),

1 foreline flange o-ring (butyl 2-267), sight glass o-ring and gasket,
8 fill and drain o-rings (Viton 2-213)

Upper (water) thermal switch 0.5 (1.0)                                   K9050005
(set at 200 °F/93 °C)

Lower (boiler) thermal switch 0.5 (1.0)                                   K9050006
(set at 600 °F/316 °C)

NOTE

• Inlet flange 35 in. ASA, foreline flange 6 in. ASA
• Inlet flange ISO 1000F (bolted), foreline flange ISO 200K (clamped)
• Not recommended for use with Santovac 5
• ASA pump versions include o-rings for both inlet and foreline flanges

• ISO pump versions include inlet flange o-ring, but does not include foreline flange centering ring-

Literature

Catalogs

Diffusion Pumps

Catalog of Agilent HS and VHS Diffusion Pumps for high vacuum. Complete model listing with specifications, drawings, pictures, ordering information and applications

Technical Overviews