VHS-10 : 马来西亚的首选 ELSO Technologies Sdn Bhd

详情

Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.

Diffusion Pumps

Highest pumping speed available.
Fluid level sight glass provides quick indication of pump fluid status at all times.
Fill and drain assembly for pump oil.
High throughput, 5100-watt version available.
Fractionating jet purifies fluid.
High tolerable forepressure.
Full thermal protection.
Stainless steel pump body

Technical Specifications

Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963)	3,650 l/s Air, 4,560 l/s He/H2 5,300 l/s Air
Maximum Throughput	6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (10.0 mbar l/s) @ 0.01 torr
Operating Range	1.7 x 10-3 to <5 x 10-9 torr at 4400 W (2.3 x 10-3 to <6.5 x 10-9 mbar)
Maximum Forepressure	No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump	≥ 30 cfm (51 m3/hr)
Backstreaming Rate, Standard Cold Cap	<5.0 x 10-4 mg/cm2/min
Warmup Time	15 minutes
Cooldown Time	25 minutes
Fluid Charge	1,000 cc
Electrical Requirements	3 ph, 50/60 Hz, 208/240/380/480 VAC
Pump Power	4400 watts
Cooling Water Requirements	0.40 gpm (80 l/hr)
Water Connections	1⁄8 in. FPT Tee

Speed Curve Graph
VHS-10 Diffusion Pump Speed Curve Graph

Pumping Speed/Standard Cold Cap Pumping speed/Extended Cold Cap Throughput

Outline Drawing
VHS-10 Diffusion Pump Outline Drawing

Description	Weight kg (lbs)	Part Number
VHS-10 Pumps		ASA	ISO
VHS-10 with standard cold cap, 208 V	68 (150)	F0426307	L5920307
VHS-10 with extended cold cap, 208 V	68 (150)	F0426317	L5920317
VHS-10 with standard cold cap, 240 V	68 (150)	F0426308	L5920308
VHS-10 with extended cold cap, 240 V	68 (150)	F0426318	L5920318
VHS-10 with standard cold cap, 380 V	68 (150)	F0426326	L5920326
VHS-10 with extended cold cap, 380 V	68 (150)	F0426336	L5920336
VHS-10 with standard cold cap, 480 V	68 (150)	F0426309	L5920309
VHS-10 with extended cold cap, 480 V	68 (150)	F0426319	L5920319
Accessories	Weight kg (lbs)	Part Number
Water-cooled baffle with ASA flanges	9.0 (20.0)	F8600310
Water-cooled baffle with ISO flanges	9.0 (20.0)	F8600311
DC-702 diffusion pump fluid, 500 cc (two required)	2.8 (6.0)	695472005
DC-704 diffusion pump fluid, 500 cc (two required)	2.8 (6.0)	695474005
DC-705 diffusion pump fluid, 500 cc (two required)	2.8 (6.0)	695475005
Centering ring for ISO foreline flange, 63K	0.5 (1.0)	IC063SV
Instruction manual		699901023
Replacement Parts (six heaters required per pump)
2200 W, 208 V heater	0.5 (1.0)	647310140
2200 W, 240 V heater	0.5 (1.0)	647310150
2200 W, 380 V heater	0.5 (1.0)	647310160
2200 W, 480 V heater	0.5 (1.0)	647310170
2550 W, 208 V heater	0.5 (1.0)	647310145
2550 W, 240 V heater	0.5 (1.0)	647310155
2550 W, 380 V heater	0.5 (1.0)	647310165
2550 W, 480 V heater	0.5 (1.0)	647310175
Heater crush plate (covers both heaters; one required for pump; replace when either heater is replaced)	1.0 (2.0)	K7667001
Heater clamping plate (one required per pump)	0.5 (1.0)	R2667301
Replacement nickel heater wire (#10 AWG)	0.5 (1.0)	656179100
Replacement o-ring kit (kit contains: 1 inlet flange o-ring (butyl F0430001), 1 foreline flange o-ring (butyl 2-338), sight glass o-ring and gasket, 10 fill and drain o-rings (Viton 2-113))	1.0 (0.5)	K0377185
Thermal switch (set at 300° F 147 °C)	0.5 (1.0)	642906025
Extended cold cap	2.0 (0.9)	L8917301

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