The Turbo-V 701 Navigator pump provides pumping speeds from 510-690 liters/sec (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio for low base pressure, high-pressure differential for high-throughput and high foreline pressure. It is designed to be oil-free and contamination free, and to have very low failure rates with the ability to operate in any position without materials stress. Typical MTTF is in excess of 250k hours. Applications for the turbo pumps include high energy physics and research, nanotechnologies, mass spectrometry, industrial vacuum processing, and semiconductors as well as dedicated pumps for Scanning Electron Microscope (SEM) work.
| Pumping speed CF 10” or ISO 200: | N2: 690 l/s | He: 620 l/s | H2: 510 l/s |
| Compression ratio | N2: 1 x 109 | He: 1 x 107 | H2: 1 x 106 |
|
Base pressure* (with minimum recommended forepump) |
<1 x 10-10 mbar (< 1 x 10-10 Torr) | ||
| Inlet flange | CF 10” / ISO 200 / ISO 200-F bolted | ||
| Foreline flange | KF25 | ||
| Rotational speed | 42,000 rpm | ||
| Start-up time | < 5 minutes | ||
| Recommended forepump |
Mechanical: Varian DS 402 Dry scroll: Varian TS300 |
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| Operating position | Any | ||
| Cooling requirements |
Natural air convection Water optional (use water with electrical conductivity ≤ 500 μS/cm) |
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| Bakeout temperature |
120 °C at inlet flange max. (CF flange) 80 °C at inlet flange max. (ISO flange) |
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| Vibration level (displacement) | <0.01 μm at inlet flange | ||
| <(lbs) kg> |
ISO flange 19.4 (43.0) CF flange 25.5 (54.2) CF and ISO bolted flange 25.5 (54.2) |
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| Description | Weight Kg (Lbs) | Part Number |
|
Turbo-V 701 Pump Complete Systems |
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| Turbo-V 701 Navigator complete system, ISO 200 flange | 19.0 (43.0) | 9698836 |
| Turbo-V 701 Navigator complete system, ISO 200-F bolted flange | 25.0 (56.0) | 9698843 |
| Turbo-V 701 Navigator complete system, 10 CF flange | 25.0 (56.0) | 9698837 |
| Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug). | ||
| Pumps | ||
| Turbo-V 701 Navigator pump, ISO 200 | 16.0 (35.0) | 9698926 |
| Turbo-V 701 Navigator pump, ISO 200-F bolted | 22.0 (49.0) | 9698945 |
| Turbo-V 701 Navigator pump, 10 CF | 22.0 (49.0) | 9698927 |
| Controllers* | ||
| Turbo-V 701 Navigator controller 120/220 V - 50/60 Hz | 3.0 (6.0) | 9698977 |
| Turbo-V 700HT Rack controller, 220 V | 16.0 (35.0) | 9699445 |
| Turbo-V 700HT Rack controller, 110 V | 16.0 (35.0) | 9699545 |
| Pump Accessories | ||
| Mains cable NEMA plug, 3 m long | 0.5 (1.0) | 9699958 |
| Mains cable European plug, 3 m long | 0.5 (1.0) | 9699957 |
|
Serial cable and T-plus Software (previous release Navigator 2.2 included in the CD) |
0.5 (1.0) | 9699883 |
| Inlet screen DN 200 | 0.5 (1.0) | 9699316 |
| Heater band, 220 V | 1.0 (2.0) | 9699807 |
| Heater band, 120 V | 1.0 (2.0) | 9699808 |
| Water cooling kit | 0.5 (1.0) | 9699337 |
| Plastic water cooling kit | 0.5 (1.0) | 9699347 |
| Air cooling kit for use with Navigator controller | 5.0 (10.0) | 9699339 |
| Air cooling kit for use with standard rack controller | 3.0 (7.0) | 9699314 |
| Bracket for Navigator controller side mounting | 2.0 (4.0) | 9699349 |
| Vibration damper, ISO 200 | 5.0 (10.0) | 9699346 |
| Vibration damper, CF 10 | 5.0 (10.0) | 9699336 |
| Vent flange, NW 10 KF / M8 | 0.5 (1.0) | 9699108 |
| Vent device with adjustable delay time for standard rack controller | 2.0 (4.0) | 9699831 |
| Vent valve for standard rack controller | 2.0 (4.0) | 9699843 |
| Vent valve for Navigator controller | 2.0 (4.0) | 9699834 |
| Purge valve 10 SCCM NW16KF M12 | 0.2 (0.5) | 9699239 |
| Purge valve 10 SCCM 1 4 Swagelok M12 | 0.2 (0.5) | 9699240 |
Malaysia
