The Turbo-V 3K-G Turbomolecular Pump (like V 2K-G) is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in control electronics, an integrated vent and purge valve, and maintenance-free bearings. All of these assets make the Agilent Turbo-V 3K-G Turbomolecular Pump the optimum pumping solution for the coating industry.
Tech Specs
| Pumping speed With ISO 250F: |
N2: 2200 l/s Ar: 2050 l/s He: 1900 l/s |
| Compression ratio |
N2: >1 x 107 Ar: >1 x 108 He: 6 x 103 |
| Throughput (sccm) | >1400 for Nitrogen |
| Base pressure (mbar) | <10-8 |
| Inlet flange | ISO 250F |
| Foreline flange | KF40 NW |
| Rotational speed | 31800 RPM |
| Start-up time | < 6 minutes |
| Foreline pressure | < 0.5 mbar |
| Recommended forepump | > 60m3/h (depending on gas flow requirements) |
| Operating position | Any |
| Cooling methods | Water |
| Weight | 52Kg |
| Description | Part Number |
| Turbo-V 3K-G Pumping Systems | |
| Turbo-V 3K-G ISO 250 F System with MoniTorr and integrated purge/vent device | 969-8888 |
| Turbo-V 3K-G ISO 250 F System with MoniTorr and Profibus and integrated purge/vent device | 969-8889 |
| (*) Pumping Systems include Pump with 230V Integrated Electronics, Inlet Screen installed on the pump, separate center-ring and pre-installed IP54 Mating Connectors. Both standard models are equipped with Varian s MoniTorr device. 120VAC units available on request | |
| Accessories | |
| Mains cable NEMA Plug, 3m long | 969-9958 |
| Mains cable European Plug, 3m long | 969-9957 |
| T-Plus Software and serial cable | 969-9883 |
| Water cooling kit for 6x8 (IDxOD) flexible tube | 969-9348 |
| Water cooling kit for 3/8 in.ID flexible tube | 969-9338 |
| Spare Parts | |
| IP54 proof mating connectors | 969-8960 |
| Inlet screen ISO 250 | 969-9350 |
| Centering ISO250 | 969-9144 |
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