Agilent TwisTorr 304 FS

Agilent TwisTorr 304 FS

Kategori: Agilent / Varian Tersedia
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Penerangan

The Agilent 300 L/s turbo pump, TwisTorr 304 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability, and economy. This 300 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.

The TwisTorr 304 FS turbomolecular pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics.

The TwisTorr 304 FS is available with onboard or rack controllers.


View the image gallery to learn more about the TwisTorr 304 FS Turbo Pump.


Features
  • Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
  • High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.
  • Copper water cooling channel (optional) - Eliminates corrosion risk and optimizes heat transfer, and reduce water consumption and cost-of-ownership.
  • Typical Turbo Pump Applications
  • Download 304 FS 3D Models
Specifications
Technical Specifications

Pumping speed:
With CFF 6” or ISO 100: With CFF 8” or ISO 160:

N2: 250 l/s
N2: 250 l/s

He: 255 l/s/
He: 255 l/s

H2: 220 l/s
H2: 220 l/s

Ar: 250 l/s
Ar: 250 l/s
Gas throughput at full rotational speed (with recommended forepump)
Ambient Temp (25 °C)
Water Temp (25 °C, 50 l/h)
N2: 170 sccm
N2: 170 sccm
Ar: 110 sccm
Ar: 110 sccm
   
Compression ratio & Foreline tolerance: N2:>1 x 1011
N2:>10 mbar
He: > 1 x 108
H2: >10 mbar
H2: 1.5 x 106
H2: >4 mbar
Ar: >1 x 1011
Ar: >10 mbar
Base pressure* (with recommended forepump) (5 m3/h) <1 x 10-10 mbar (< 1 x 10-10 Torr)      
Inlet flange CFF'' 8 O.D.
CFF'' 2 6 O.D.
ISO 160
ISO 100
   
Foreline flange KF 16 NW (KF25 - optional)      
Rotational speed  60000 rpm (1010 Hz driving frequency)      
Start-up time <3 minutes      
Recommended forepump Mechanical: Agilent DS 102
Dry pump: Agilent SH 110
     
Operating position Any      
Operating ambient temperature +5 °C to +35 °C      
Relative humidity of air 0 - 90 % (not condensing)      
Bakeout temperature 120 °C at inlet flange max. (CFF flange) 80 °C at inlet flange max. (ISO flange)      
Lubricant Permanent lubrication      
Cooling requirements Forced air (5- 35 °C ambient temperature)
Water (mandatory if ambient temperature > 35 °C)
     
Coolant water Minimum flow:
50 l/h (0.89 GPM))
Temperature:
+15 °C to +30 °C
Pressure:
3 to 5 bar (45 to 75 psi)
 
Noise pressure level < 50 dB(A) at 1 meter      
Storage temperature -40 °C to +70 °C      
Max altitude 3000 m      
Weight kg (lbs):
Pump ISO 100:
5.5 (12.3)
Pump CFF 6”:
7.5 kg (16.5)
Pump ISO 160:
5.7 kg (12.6)
Pump CFF 8”:
9.7 kg (20.9)
 
 

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