Agilent / Varian CDG-500 Capacitance Diaphragm Gauge

Agilent / Varian CDG-500 Capacitance Diaphragm Gauge

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Penerangan

CDG-500 Capacitance Diaphragm Gauge

 

The Agilent CDG-500 series of temperature compensated Capacitance Diaphragm gauges provides a high level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 Torr to 1 Torr. The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warm-up times and unparalleled robustness.

CDG500T1000KF16 CDG-500, capacitance diaphragm gauge, 1000 Torr, KF16
CDG500T0010VCR8 CDG-500, capacitance diaphragm gauge, 10 Torr, VCR8
CDG500T0001VCR8 CDG-500, capacitance diaphragm gauge, 1 Torr, VCR8
CDG500T0100KF16 CDG-500, capacitance diaphragm gauge, 100 Torr, KF16
CDG500T0100VCR8 CDG-500, capacitance diaphragm gauge, 100 Torr, VCR8
CDG500T0001KF16 CDG-500, capacitance diaphragm gauge, 1 Torr, KF16
CDG500T0010KF16 CDG-500, capacitance diaphragm gauge, 10 Torr, KF16
CDG500T1000VCR8 CDG-500, capacitance diaphragm gauge, 1000 Torr, VCR8
CDG500T0010KF16S CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, KF16
CDG500T0100VCR8S CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, VCR8
CDG500T1000KF16S CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, KF16
CDG500T0100KF16S CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, KF16
CDG500T0001VCR8S CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, VCR8
CDG500T0001KF16S CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, KF16
CDG500T0010VCR8S CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, VCR8
CDG500T1000VCR8S CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, VCR8


Features
  • Full scale ranges from 1 to 1000 Torr with push button zeroing and optional set point control providing ease of integration
  • Excellent long term signal stability and repeatability
  • Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
  • Application robustness is achieved through a corrosion-resistant ceramic sensor with sensor-shielding protection
Specifications
Technical Specifications

Measurement range (full scale) Torr 1000 100 10 1
Pa 133,322 13,332 1,333 133
mbar 1333 133 13.3 1.3
% of reading 0.2 0.2 0.2 0.2
Temperature effect
On zero
On zero % F.S. / °C 0.005 0.005 0.005 0.015
On span % of reading/ °C 0.01 0.01 0.01 0.01
Resolution % F.S. 0.003 0.003 0.003 0.003
Pressure, maximum kPa (absolute) 400 260 260 260
Lowest reading % F.S. 0.01
Lowest suggested reading % F.S. 0.05
Lowest suggested control pressure % F.S. 0.05
Temperature Operation (ambient) Bakeout
(at flange)2
Storage
5 to 50 °C <110 °C –40 to 65 °C
Supply voltage 14 to 30 VDC
Power consumption <1 W
Output signal (analog) 0 to 10 VDC
Response time 30 ms
Degree of protection IP30
Electrical connection D-sub, 15 pole, male
Setpoints3 – Two (2) setpoints, SP 1 and SP 2 Relay Contact Hysteresis
30 VDC; <0.5 ADC 1% of F.S
Materials exposed to vacuum Aluminum oxide ceramic (Al2O3), Vacon 704, stainless steel (AlSl 316L5) AgCuTi hard solder, sealing glass

1 Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation
2 Non-operating
3 CDG-500 setpoint versions only
4 28% Ni, 23% Co, 49% Fe
5 18% Cr, 10% Ni, 3% Mo, 69% Fe
Outline Drawing
CDG-500 Capacitance Diaphragm Gauge Outline Drawing




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