UL1000 Fab

Kategori: Helium Leak Detector Tersedia
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Penerangan

The “Dry” Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing 

The INFICON UL1000 Fab Helium Leak Detector is the renowned standard when it comes to economic helium vacuum leak testing in industrial or semiconductor environments.

Potential contamination of the tested parts or equipment by carbon-hydrogen compounds or particles is eliminated through the instrument’s dry pump technology. The UL1000 Fab provides the best compromise between high performance, unparalleled robustness, and affordability. It provides state-of-the art detection limits of 10-12 mbar*l/s combined with reasonable short pump down and response time. The compact design provides high maneuverability allowing easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) enables continuous leak testing within at least two decades lower than existing background levels. 

All features enable you to shorten the time of your leak testing efforts while assuring that all leaks can be identified at an economic scale.

Advantages

Typical Applications

Specifications

Min. detectable leak rate for Helium (Vacuum mode) mbar•L/s < 5 • 10-12
Min. detectable leak rate for Helium (Sniffer mode) mbar•L/s < 5·10-8
Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed ULTRA mode L/s 2.5
Detectable masses   2,3,4 amu
Mass spectrometer Sector field   180°
Filaments ion source Iridium/Yttria coated   2
Calibrated built-in leak mbar•L/s ∼ 10-7
Test port DN 25 KF 1
Adjustable triggers   2
Interface   RS 232
Chart recorder output V 2 x10
In/Outputs   PLC compatible
Permissable ambient temperature (during operation) °C +10 to +40
Weight kg
lb
110
242
Dimensions (l x w x h) mm
in.
1050 x 472 x 987
41 x 19 x 39
Supply voltage (EU) V (ac) 230 (± 10 %) 50 Hz
Supply voltage (US) V (ac) 100/115 V (± 10 %) 50/60 Hz
Power consumption (typ.) VA 1100
Power consumption (max.) VA 1100

 

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