Pumping Speed, Operating Range |
65 l/sec Air, 90 l/s He and H2 |
Maximum Throughput |
0.19T-l/s (0.25 mbar-l/s) in operating range 0.30T-l/s (0.40 mbar-l/s) @ 0.01 torr |
Compression Ratio |
4 x 107 (Air), 2 x 106 (helium) |
Operating Range |
3 x 10-3 to <5 x 10-8 torr (3.9 x 10-3 to 6.5 x 10-8 mbar) |
Maximum Forepressure |
No load: 0.75 torr (1.00 mbar) Full Load: 0.60 torr (0.78 mbar) |
Backstreaming Rate |
With cold cap: <2 x 10-4 mg/cm2/min With baffle: <2 x 10-5 mg/cm2/min |
Recommended Backing Pump |
≥1.5 cfm (2.5 m3/hr) |
Warmup Time |
7 minutes |
Cooldown Time |
10 minutes |
Fluid Charge |
30 cc |
Electrical Requirements |
1 ph, 50/60 Hz, 90/115/165/220 VAC |
Pump Power |
200/250 watts |
Air Cooling |
30 cfm |