HS-20 Diffusion Pump

The Agilent HS-20 Oil Diffusion Pump is a pump with a high throughput and high pumping speed of 10,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 20 in. ASA or ISO 630K inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics, and protective film layers.

			QTY
84341308	HS-20 diffusion pump, with standard cold cap, 12000 W, 240 V wired Delta Parallel, ASA flange	1 Each	Quantity
84341309	HS-20 diffusion pump, with standard cold cap, 12000 W, 480 V wired Delta Series, ASA flange	1 Each	Quantity
84341318	HS-20 diffusion pump, with Halo Baffle, 12000 W, 240 V wired Delta Parallel, ASA flange	1 Each	Quantity
84341319	HS-20 diffusion pump, with Halo Baffle, 12000 W, 480 V wired Delta Series, ASA flange	1 Each	Quantity
84341326	HS-20 diffusion pump, with standard cold cap, 12000 W, 415 V wired WYE Parallel, ASA flange	1 Each	Quantity
84341336	HS-20 diffusion pump, with Halo Baffle, 12000 W, 415 V wired WYE Parallel, ASA flange	1 Each	Quantity
L5922308	HS-20 diffusion pump, ISO, cold cap, ISO, 240 V	1 Each	Quantity
L5922309	HS-20 diffusion pump, ISO, cold cap, 480 V	1 Each	Quantity
L5922318	HS-20 diffusion pump, ISO, halo baffle, 240 V	1 Each	Quantity
L5922319	HS-20 diffusion pump, ISO, halo baffle, 480 V	1 Each	Quantity
L5922326	HS-20 diffusion pump, ISO, standard cold cap, 415 V	1 Each	Quantity
L5922336	HS-20 diffusion pump, ISO, halo baffle, 415 V	1 Each	Quantity

Features

Five-stage fractionating jet purifies pumping fluid and assures low base pressure
High tolerable forepressure
Full thermal protection
Fluid-level sight glass provides quick indication of pump fluid status at all times
Fill and drain assembly for pump fluid
Standard gauge port (NW-25) below inlet flange included
Foreline baffle prevents loss of fluid into backing pump system
Optional halo baffle reduces backstreaming without adding height

Specifications

Backstreaming Rate	1.5 x 10-3 mg/cm²/min
Cooldown Time	45 min
Electrical Requirements	3 ph 50/60 Hz 240/415/480 V
Fluid Charge	18927 CC
Fluid Type	Oil
Input Voltage	240, 415, 480 V
Maximum Forepressure - Full Load	0.55 Torr 0.72 mbar
Maximum Forepressure - No Load	0.65 Torr 0.85 mbar
Maximum Throughput	12.5 T-L/s (16.7 mbar-L/s)
Operating Range	1.3 x 10-3 to 5 x 10-8 Torr 1.7 x 10-3 to 6.5 x 10-8 mbar
Pump Power	12000 W
Pump Weight	600 lbs 272.2 kg
Pumping Speed - Air	10000 L/s
Pumping Speed - Air, via AVS 4.1 (1963)	17500 L/s
Pumping Speed - He/H2	12500 L/s
Recommended Backing Pump	≥ 100 cfm (170 m3/hr)
Warmup Time	45 min
Water Connections	1/4 inch FPT
Water Cooling - Temperature Requirement	60-80 °F 15-26 °C
Water Cooling Flow Requirement	1.5 gpm 300 L/hr

Literature

Catalogs: Diffusion Pumps

Catalog of Agilent HS and VHS Diffusion Pumps for high vacuum. Complete model listing with specifications, drawings, pictures, ordering information and application
Technical Overviews: Maintenance and Troubleshooting of Oil Diffusion Pumps

This solution note tells how diffusion pumps work, how to operate diffusion pumps, how to maintain and troubleshoot issues.

Support

FAQs

KB005760: What solvents are recommended for cleaning diffusion pumps?

PUMP: What solvents are recommended for cleaning diffusion pumps?

Supplemental Information

HS-20 Diffusion Pump Ordering Details

User Manuals

High Throughput Diffusion Pumps user manual

Instructions for use and technical specifications for High Throughput Diffusion Pumps for use with HS-16, HS-20, HS-32 and NHS-35

Tools

Download 3D Models HS-20 Diffusion Pump

STEP file models

Services

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Find the right heaters, O-rings, thermal switches, oil, sight glass, or other spare parts or consumables for your Agilent or Varian diffusion pump to keep its performance at peak levels. Only parts from the original equipment manufacturer ensure fit, form, and function for your diffusion pump. Common spare parts and consumables are stocked for fast delivery and can be ...

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Get genuine original manufacturer parts for your Agilent or Varian vacuum equipment. Including parts for your leak detector, diffusion pump, scroll pump, ion pump, rotary vane pump, and XGS gauge controller. Commonly needed components include pump heaters, pump oil, maintenance kits, tip seals, filaments, thermostats, O-rings, and spectrometers.|Use the online chat ...

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