Automated mobile robots (AMRs) equipped with handling robots are advanced systems used in the semiconductor industry to enhance material handling and logistics. These AMRs autonomously navigate through manufacturing facilities, transporting delicate semiconductor wafers, FOUPs (Front Opening Unified Pods), and other critical components between processing stations. These AMRs with handling robots increase operational efficiency, lower personnel costs, and assure the exact and dependable transportation of delicate components during the semiconductor manufacturing process.
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