|
Model No. |
AXYR60-A2PR-ND |
AXYR60-A2PL-ND |
AXYR60-A2UPR-CD |
AXYR60-A2UPL-CD |
||
|
Mechanical Spec. |
Table Size (mm) |
Ø 60 |
||||
|
Travel Stroke X Axis (mm) |
± 7.5 |
|||||
|
Travel Stroke Y Axis (mm) |
± 7.5 |
|||||
|
Travel Stroke θ Axis (°) |
± 8.5 |
|||||
|
Drive Type |
Ball Screw |
|||||
|
Rail XY Axis |
Crossed Roller Guiding |
|||||
|
Rail θ Axis |
Crossed Roller Bearing |
|||||
|
Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized |
|||||
|
Accuracy Level |
PPrecision grade |
UPUltra Precision grade |
||||
|
Motor Assembly Direction |
Right |
Left |
Right |
Left |
||
|
Precision Spec. |
XY Axis Resolution (Pulse) (µm) |
5 (Full)2.5 (Half) |
2 (Full)1 (Half) |
|||
|
θ AxisResolution (Pulse) (°) |
0.0056 (Full)0.0028 (Half) |
0.0022 (Full)0.0011 (Half) |
||||
|
XY Axis Max. Speed (Full Step) (mm / sec) |
10 |
5 |
||||
|
θ Axis Max. Speed (Full Step) (° / sec) |
8 |
|||||
|
XY Axis Positioning Presion (µm) |
10 |
5 |
||||
|
XY Axis Repeatability Precision (µm) |
± 1 |
± 0.5 |
||||
|
θ Axis Positioning Presion (°) |
0.05 |
0.03 |
||||
|
θ Axis Repeatability Precision (°) |
± 0.01 |
± 0.003 |
||||
|
Load Capacity (Kgf) |
6 |
|||||
|
XY Axis Missed Step (µm) |
2 |
1 |
||||
|
θ Axis Missed Step (°) |
0.01 |
0.003 |
||||
|
Parallelism (µm) |
20 |
|||||
|
Dynamic Straightness (µm) |
20 | |||||
|
Dynamic Parallelism (µm) |
10 |
|||||
|
Electrical Spec. |
Motor Type |
2MS-N28D32A |
SH5281-7211 |
|||
|
Motor Brand |
GMT |
SANYO |
||||
|
Connector |
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS |
||||
|
Controller Side Connector |
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) |
|||||
|
Sensor |
Power Voltage |
24V ± 10% |
||||
|
Control Output |
NPN open collector output under 24V 8mA |
|||||
|
Output Control |
Testing (sensing)output transistor OFF (closed) |
|||||
| System Configuration Diagram |
|
♦ For selection of the drivers preferred, please refer to the reference table or the catalogue of Motor0Driver. ♦ All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs.
|
| Axis Definition |
|
GMT has defined different axis as the following figuration according to the movement direction: Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction.
|
Motor0driver Reference Table |
|
|
|
|
