★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.
★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
★ 3D CMM- Ensure the quality and precision of the stage.
|
Model No. |
GAS03-1000CC-PN |
GAS03-1000CC-UPJ |
GAS03-1000RS-PN |
GAS03-1000RS-UPJ |
GAS03-1500CC-PN |
GAS03-1500CC-UPJ |
GAS03-1500RS-PN |
GAS03-1500RS-UPJ |
|
Stage Size (mm) |
1000x1000 |
1000x1000 |
1000x1000 |
1000x1000 |
1500x1500 |
1500x1500 |
1500x1500 |
1500x1500 |
|
Base Size (mm) |
1200x1200 |
1200x1200 | 1200x1200 | 1200x1200 | 1700x1700 | 1700x1700 | 1700x1700 | 1700x1700 |
|
Height (mm) |
160 | 160 | 160 | 160 | 160 | 160 | 160 | 160 |
|
Travel Stroke (mm) |
±15x±15 | ±15x±15 | ±15x±15 | ±15x±15 | ±15x±15 | ±15x±15 | ±15x±15 | ±15x±15 |
|
Angle (θ)° |
±2° | ±2° | ±2° | ±2° | ±1° | ±1° | ±1° | ±1° |
|
Stage Material |
Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
|
Stage Surface Treatment |
Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
|
Base Material |
Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
|
Base Surface Treatment |
Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
|
Ball Screw Spec. |
Ø10-P4 | Ø10-P4 | Ø20-P2 | Ø20-P2 | Ø10-P4 | Ø10-P4 | Ø20-P2 | Ø20-P2 |
|
Dynamic Load Capacity (kgf) |
80 | 80 | 90 | 90 | 85 | 85 | 100 | 100 |
|
Static Load Capacity (kgf) |
170 | 170 | 200 | 200 | 180 | 180 | 200 | 200 |
|
Repeatability Accuracy (μm) |
±5 | ±1 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 |
|
Parallelism (μm) |
150 | 150 | 150 | 150 | 150 | 150 | 150 | 150 |
|
Motor Brand |
GMT | Oriental | GMT | Oriental | GMT | Oriental | GMT | Oriental |
|
Motor Type |
2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper |
|
Motor Shaft |
□57 Double Shaft | □60 Double Shaft | □57 Double Shaft | □60 Double Shaft | □57 Double Shaft | □60 Double Shaft | □57 Double Shaft | □60 Double Shaft |
|
Motor Model. No. |
2MS- N57D41A |
PKP564 FN24BW |
2MS- N57D41A |
PKP564 FN24BW |
2MS- N57D41A |
PKP564 FN24BW |
2MS- N57D41A |
PKP564 FN24BW |
|
Driver Brand |
Contact us | Oriental | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental |
|
Driver Model. No. |
Contact us |
CVD524-K |
Contact us |
CVD524-K |
Contact us |
CVD524-K |
Contact us |
CVD524-K |
| Characteristics |
|
♦ Ultra thin appearance Achieved with the lighted crossed roller bearings and modularized structures. ♦ High stiffness and high precision Applying preload operations on every roller bearings of stages for better rigidity and precision. ♦ Hollow structure Lightweight structure of the stages could be suitable for optical inspection devices. ♦ Lubrication system Well lubricating gives the stages longer using life and reliable accuracy. ♦ Genericity Available sizes from 160mm to 1500mm, even capable of heightening load resistance by adding driven modules. |
| Applications |
|
♦ Panel lamination machinery ♦ Panel film laminating machines ♦ Print screen and 3D printing ♦ Angular glass cutting and grinding equipment ♦ Wafe alignment equipment ♦ P.C.D exposure equipment ♦ Software cutting equipment ♦ Semi-conductor equipment |
Structures and Lubrication System |
|
|
Transmission Theory |
|
|
