Description

EVP Series Dry Scroll Vacuum Pump

Model (pumping speed) : EVP-150 (7m3/hr), EVP-300 (15.5m3/hr), EVP-600 (31.3m3/hr), EVP-1000 (59.8m3/hr)

Main Applications：

It is used widely in Semiconductor Industry, Pharmaceutical industry, vacuum packing and scientific and chemical analysis. It can work well with below:
1. Photovoltaic production line
2. Lithium battery manufacturing process
3. Freezer dryer
4. Film preparation equipment
5. As backing pump of molecular pump.
6. Used for scientific and chemical analysis

7. An aux.pump in oil-free pumping system
8. Used in enclosing room in sem-conductor fab. equipments
9. An aux.pump in electron miscrope
10. Used in IC equipment

Technical Features：

Invulnerable to exterior dust contamination;

Interior oil-free, clean vacuum assured;

Smooth running, low noise;

Water cooling unneeded, corrosion-proof;

Easy operation, low maintenance expense;

Advantage：

1.EVP dry scroll pump is designed by reference of the design of Edwards, Varian, Iwata.
2.Same seal & gasket of Japan Anest Iwata.
3.Fast delivery.

Technical Data：

Item	Technical Specifications （50hz）
Model	EVP-300	EVP-600	EVP-1000
Nominal capacity	4 L/s	8 L/s	16 L/s
Ultimate pressure	3Pa	3Pa	3Pa
Water vapor treatment capacity (gas ballast open)	25g/day	25g/day	25g/day
Motor Data	0.55KW	0.75KW	1.5KW
Rotary speed	1450rpm	1450rpm	1450rpm
Temperature	5~40℃
Noise	＜65dB	＜65dB	＜68dB
Noise (gas ballast)	＜70dB	＜70dB	＜74dB
Gas inlet	KF25	KF40	KF40
Gas outlet	KF25	KF25	KF40
Dimension	470X270X364	490X340X370	560X390X420
（LXWXH）	(mm)
Weight	35Kg	44Kg	64Kg

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