The Agilent 800 L/s turbomolecular pump, TwisTorr 804 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability and economy. This turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.
This 800 L/s turbomolecular pump with ISO 200K, 250K and CFF 10 in inlet flanges, is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics.
Agilent also provides TwisTorr FS-OS turbo pumps, designed for academia, research, and other applications that require long-term operation in demanding conditions.
The TwisTorr 804 FS is available with onboard or rack controllers.
View the image gallery to learn more about the TwisTorr 804 FS Turbo Pump.| Pumping speed: | ISO200K-F |
ISO250K-F
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CFF10 |
|
N2 He H2 Ar |
720 L/s 660 L/s 485 L/s 690 L/s |
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| Max Gas Throughput(*) |
Air Cooling (25°C Air temperature) |
Water Cooling (15°C Water temperature / 25°C room temperature) |
|
| N2 |
4.3 mbarL/s 255 SCCM |
6.1 mbar L/s 367 SCCM |
|
| He |
7.9 mbar L/s 467 SCCM |
10.4 mbar L/s 615 SCCM |
|
| Ar |
1.5 mbar L/s 89 SCCM |
3.3 mbar L/s 195 SCCM |
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| (*) Backing pump 11.6 m3/hr | |||
| Compression ratio and foreline tolerance* | |||
|
N2 He H2 Ar |
>1E+11 2E+08 3E+06 1E+11 |
10 mbar 10 mbar 4 mbar 8.5 mbar |
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| (*) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode | |||
| Base pressure with recomm. forepump |
< 1 x 10-10 mbar (< 1 x 10-10 Torr) |
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| Inlet flange |
ISO 200K, ISO 200F, ISO 250K, ISO 250F, CFF 10” |
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| Foreline flange | NW25 or NW40 | ||
| Recommended forepump |
DS302 IDP10 IDP15 |
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| Operating position | Any | ||
| Oper. ambient temperature | +5 °C to +35 °C | ||
| Lubricant | Permanent grease lubrication | ||
| Cooling requirements | |||
| Air cooling | Air temperature from +5°C to 35°C | ||
| Water cooling |
Water temperature from +15°C to +25°C Water flow min. 100L/h |
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|
Noise Pressure Level (at 1m at full speed) |
43dB(A) |
