Agilent / Varian Turbo-V 1001 Navigator

Agilent / Varian Turbo-V 1001 Navigator

Danh mục: Agilent / Varian Có sẵn
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Mô tả

The Agilent 1000 L/s turbo pump provides high pumping speeds from 790-1,050 L/s (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio and consequent low base pressure, high-throughput and high foreline pressure. It is designed to be oil-free and contamination-free, and to have very high reliability with the ability to operate in any position without materials stress.

Applications for this turbo pump include high energy physics and research, nanotechnologies, mass spectrometry, industrial vacuum processing, semiconductors and electron microscopy.


Features


Specifications
 
Technical Specifications

Pumping speed:
ISO 160:
CFF 10” or ISO 200:
ISO 250:
N2: 790 l/s
N2: 950 l/s
N2: 1,050 l/s
He: 820 l/s
He: 870 l/s
He: 900 l/s
H2: 860 l/s
H2: 900 l/s
H2: 920 l/s
Compression ratio: ISO 160 N2: 1 x 109 He: 1 x 107 H2: 1 x 106
Base pressure* (with recommended forepump) <1 x 10-10 mbar (< 1 x 10-10 Torr)      
Inlet flange ISO 160 ISO 200 ISO 200-F bolted            CFF 10” ISO 250 ISO 250-F bolted
Foreline flange KF 40      
Rotational speed  38,000 rpm      
Start-up time <4 minutes      
Recommended forepump Mechanical: Agilent DS 402 Dry scroll: Agilent TS300, IDP-15      
Operating position Any      
Cooling requirements Forced air or water      
Bakeout temperature
120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
     
Vibration level (displacement) < 0.01 μm at inlet flange      
Weight kg (lbs):
ISO 160 flange 
ISO 200 flange 
CF 10” flange 
ISO 250 flange 
ISO 200-F and 250-F bolted flange, CF 10” flange
19 (41.8)
19.4 (43.0)
25.5 (54.2)
21.2 (46.6)
25.5 (54.2)
   
* According to standard DIN 28 428.
available with On-board Navigator controller, ½ Rack controller or PCB controller;
for information on controllers see also following pages.

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