Mô tả
Turbo Pumps
Turbo-V 2K-G
The Agilent high throughput turbomolecular pump, Turbo-V 2K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump's robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 2K-G the optimum pumping solution for the vacuum coating industry.
Order Information
Turbo Pump, Accessories and Spare Parts
|
Description |
Part number |
|
Turbo-V 2K-G system |
9698871 |
|
Turbo 2K-G with ProfiBus |
9698873 |
|
Mains cable NEMA Plug, 3m long |
9699958 |
|
Mains cable European Plug, 3m long |
9699957 |
|
Serial cable and A-PLUS Software |
9699883 |
|
Protocol Converter RS-232 <-> RS-485 wire |
9699258 |
|
Inlet screen ISO 250 with center ring viton |
9699138 |
|
Water cooling kit for 6x8 (IDxOD) flexible tube (plastic model) |
9699348 |
|
Water cooling kit for 3/8 in. ID flexible tube (metallic model) |
9699338 |
|
IP-54 Accessory kit – Type 1 |
9698960 |
|
Turbo-V Remote Panel |
9698850 |
|
Exchange Turbo-V 2K-G system |
EX9698871 |
|
Exchange Turbo 2K-G with ProfiBus |
EX9698873 |
Features
The first application-specific pumping solution designed for thin film deposition equipment
The highest performing, most compact unit available
The first fully integrated approach for maximum system productivity and uptime
Integrated package includes Turbo Molecular Pump, Drive Electronics, Power Supply, MoniTorr, Purge Gas and Communication
Versatile electronics interface with easy to use control Software Analog I/O signals and RS232 / RS485 interface as standard
Agilent Profibus interface (optional)
Specifications
Technical Specifications
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Pumping speed: |
N2: 1600 l/s
|
|
|
Compression ratio: |
N2: 3 x 105 |
|
|
Base pressure* (with recommended forepump) |
<1 x 10-8 mbar |
|
|
Inlet flange |
ISO 250F |
|
|
Foreline flange |
KF 40 NW |
|
|
Nominal rotational speed |
33,000 rpm |
|
|
Start-up time |
<7 minutes |
|
|
Recommended forepump |
> 40 m3 /h |
|
|
Operating position |
Any |
|
|
Operating ambient temperature |
+5 °C to +40 °C |
|
Power supply
Input voltage
Input freq. |
100 - 240 Vac
50 - 60 Hz |
|
|
Communication interface |
Analogue I/O
RS232 / RS485
Profibus |
Standard
Standard
Optional |
|
Dimensions |
Height
Weight
Diameter
|
335 mm (13.18 in.)
335 mm (13.18 in.)
35 kg (77 lbs)
|
* According to standard DIN 28 428.
Literature
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Application Notes
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Catalogs
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Software
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